Epitaxial Growth of III-Nitride Layers on Aluminum Nitride Substrates

Development of Aluminum Nitride Single-Crystal Substrates

High-frequency, high-power semiconductor devices are widely used in electric vehicles, medical equipment, home appliances, and communication equipment. Recently, there has been a growing demand for semiconductors that have such characteristics as high withstand voltage, high speed and high-temperature operation, low power consumption and radiation resistance. To meet this demand, silicon carbid...

Epitaxial Growth of III–Nitride/Graphene Heterostructures for Electronic Devices

Epitaxial GaN films were grown by metal organic chemical vapor deposition (MOCVD) on functionalized epitaxial graphene (EG) using a thin ( 11 nm) conformal AlN nucleation layer. Raman measurements show a graphene 2D peak at 2719 cm 1 after GaN growth. X-ray diffraction analysis reveals [0001]-oriented hexagonal GaN with (0002) peak rocking curve full width at the half maximum (FWHM) of 544 arcs...

Modified Wurtzite Structure Oxide Compounds as Substrates for III-V Nitride Compound Semiconductor Epitaxial Growth

Aluminum Nitride piezo-MEMS on polyimide flexible substrates

0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2011.02.080 ⇑ Corresponding author. Tel.: +39 0 832 295726; fa E-mail addresses: [email protected], simopetro In this work the micro-fabrication of flexible MicroElectroMechanical transducers based on the piezoelectric effect is reported. We developed the technological protocol to realize a piezoelectric transducer composed...

Molecular beam epitaxial growth of gallium nitride nanowires on atomic layer deposited aluminum oxide

Semiconductor nanowires have received increasing focus from researchers due to their one dimensional characteristics, which offer new horizons for device designs. Nanowire growth has been shown to yield crystalline material on non-lattice matched substrates. Concerning gallium nitride nanowires, common growth substrates have been silicon (100) and (111) substrates. This manuscript discusses the...